Handbook of Plasma Processing Technology : Fundamentals, Etching, Deposition, and Surface Interactions (Materials Science and Process Technology)

• Publisher: Noyes Publications
• Number Of Pages: 523
• Publication Date: 1990-01-01
• Sales Rank: 1396695
• ISBN / ASIN: 0815512201
• EAN: 9780815512202
• Binding: Hardcover
• Manufacturer: Noyes Publications
• Studio: Noyes Publications
• Book Description:
  

  This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.

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